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Year 2019 Volume 17, Issue 4 |
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Issues/2019/vol. 17 /Issue 4 |
O. M. Bordun, I. O. Bordun, I. M. Kofliuk, I. Yo. Kukharskyy, I. I. Medvid, Î. Ya. Mylyo, D. S. Leonov
«Synthesis and Structure of \(Y_2O_3\):Eu Thin Films»
711–716 (2019)
PACS numbers: 61.05.cf, 61.05.cp, 61.72.Mm, 68.55. J-, 81.07.Wx, 81.15.Cd
The \(Y_2O_3\):Eu thin films were obtained by radio frequency (RF) ion-plasma sputtering in different atmospheres. The phase composition of the obtained films was investigated based on x-ray phase analysis and various causes of diffraction stripes expansion were considered. It is shown that an increase in the \(O_2\) sputtering atmosphere of Ar leads to a decrease in the size of the nanocrystallites forming the \(Y_2O_3\):Eu film from 5.9 to 5.0 nm and a decrease in the structural perfection of the films and an increase in their mechanical stresses.
Keywords: yttrium oxide, thin films, nanocrystallite
https://doi.org/10.15407/nnn.17.04.711
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 This article is licensed under the Creative Commons Attribution-NoDerivatives 4.0 International License © NANOSISTEMI, NANOMATERIALI, NANOTEHNOLOGII G. V. Kurdyumov Institute for Metal Physics of the National Academy of Sciences of Ukraine, 2019 E-mail: tatar@imp.kiev.ua Phones and address of the editorial office About the collection User agreement |