Download the full version of the article (in PDF format)
O. M. Bordun, B. O. Bordun, I. J. Kukharskyy, I. I. Medvid, O. Ya. Mylyo, M. V. Partyka, and D. S. Leonov
«Influence of Fabrication Conditions on Structure and Morphology of a Surface of Thin \(\beta-Ga_2O_3\) and \((Y_{0.06}Ga{0.94})_2O_3\) Films»
123–131 (2019)
PACS numbers: 61.05.cp, 61.72.Dd, 61.72.Ff, 68.37.Ps, 68.55.J-, 68.55.Nq, 81.15.Cd
The structure, phase composition, and surface morphology of thin \(\beta-Ga_2O_3\) and \((Y_{0.06}Ga{0.94})_2O_3\) films obtained by high-frequency ion-plasma sputtering in different atmospheres of heat treatment are investigated. As shown, the processes of sintering and growth of crystallites are taking place more considerably in \((Y_{0.06}Ga{0.94})_2O_3\) films as compared with \(\beta-Ga_2O_3\) films.
Keywords: gallium oxide, thin films, crystallite
https://doi.org/10.15407/nnn.17.01.123
References
1. C. Jin, S. Park, H. Kim, and C. Lee, Sensors and Actuators B, 161, No. 1: 223 (2012). https://doi.org/10.1016/j.snb.2011.10.023
2. K. H. Choi and H. C. Kang, Materials Letters, 123: 160 (2014). https://doi.org/10.1016/j.matlet.2014.03.038
3. J.-T. Yan and C.-T. Lee, Sensors and Actuators B, 143, No. 1: 192 (2009). https://doi.org/10.1016/j.snb.2009.08.040
4. L. Kong, J. Ma, C. Luan, W. Mi, and Yu Lv, Thin Solid Films, 520, No. 13: 4270 (2012). https://doi.org/10.1016/j.tsf.2012.02.027
5. K. Shimamura, E. G. Villora, T. Ujiie, and K. Aoki, Appl. Phys. Lett., 92, No. 20: 201914 (2008). https://doi.org/10.1063/1.2910768
6. C. Shang, X. Shang, Y. Qu, and M. Li, Chem. Phys. Lett., 501, Nos. 4-6: 480 (2010). https://doi.org/10.1016/j.cplett.2010.11.085
7. P. Packiyaraj and P. Thangadurai, J. Lumin., 145: 997 (2014). https://doi.org/10.1016/j.jlumin.2013.07.074
8. O. M. Bordun, I. M. Bordun, and S. S. Novosad, J. Appl. Spectosc., 62, No. 6: 1060 (1995).
9. A. Yousif, H. C. Swart, and O. M. Ntwaeaborwa, Appl. Surf. Sci., 258, No. 17: 6495 (2012). https://doi.org/10.1016/j.apsusc.2012.03.066
10. V. F. Popova, A. G. Petrosyan, E. A. Tugova, D. P. Romanov, and V. V. Gusarov, Russian J. Inorganic Chem., 54, No. 4: 624 (2009). https://doi.org/10.1134/S0036023609040202
|