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O. M. Bordun, B. O. Bordun, I. J. Kukharskyy, I. I. Medvid, O. Ya. Mylyo, M. V. Partyka, and D. S. Leonov
«Influence of Fabrication Conditions on Structure and Morphology of a Surface of Thin \(\beta-Ga_2O_3\) and \((Y_{0.06}Ga{0.94})_2O_3\) Films»
123–131 (2019)

PACS numbers: 61.05.cp, 61.72.Dd, 61.72.Ff, 68.37.Ps, 68.55.J-, 68.55.Nq, 81.15.Cd

The structure, phase composition, and surface morphology of thin \(\beta-Ga_2O_3\) and \((Y_{0.06}Ga{0.94})_2O_3\) films obtained by high-frequency ion-plasma sputtering in different atmospheres of heat treatment are investigated. As shown, the processes of sintering and growth of crystallites are taking place more considerably in \((Y_{0.06}Ga{0.94})_2O_3\) films as compared with \(\beta-Ga_2O_3\) films.

Keywords: gallium oxide, thin films, crystallite

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