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O. M. Bevza, S. B. Sydorenko, and A. V. Mumladze
«Deposition of the Two-Component Composition Containing a Magnetic Material by Magnetron Sputtering System»
577–589 (2016)
PACS numbers: 34.50.-s, 41.20.Gz, 52.25.Tx, 52.77.Dq, 81.15.Cd, 84.40.Fe, 85.70.Ay
To create a two-component magnetron sputtering system, where one component of it is a magnetic material, it is necessary to solve the following tasks: to develop the design of the magnetron sputtering system with shunted magnetic field lines by the target material; to provide the necessary ratio of materials in the deposited film. This paper analyses the ways to solve a problem of shunting the magnetic field lines by the target material. A design of the magnetron sputtering system, which allows sputtering the magnetic and nonmagnetic materials, is developed. A simple determination method for the ratio of materials in the deposited film is suggested. The simulation results and experimental research of developed magnetron sputtering system are presented.
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