Выпуски

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2014

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том 12 / 

выпуск 1

 



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Composition and structure of the multicomponent films are investigated in the case when they are fabricated by the vacuum-arc source with the discharge located near the working surface of the cathode made of the standard alloys. The table composition, density, electric conductivity and other physical and technical specifications of the cathode material are saved when the deposition occurs in the direct flow.
«Ионно-плазменное нанесение наноструктурированных многокомпонентных покрытий на термолабильные материалы»
073–080 (2014)

PACS numbers: 52.80.Pi, 68.35.Ct, 68.37.Ef, 68.37.Ps, 81.15.Gh, 82.80.Ms, 85.40.Sz

Composition and structure of the multicomponent films are investigated in the case when they are fabricated by the vacuum-arc source with the discharge located near the working surface of the cathode made of the standard alloys. The table composition, density, electric conductivity and other physical and technical specifications of the cathode material are saved when the deposition occurs in the direct flow.

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