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R. I. BIGUN, Z. V. STASYUK, A. V. BORODCHUK, and Ya. A. PASTYRSKY
«Impact of Sb and Ge Surfactant Underlayers on Cu and Au Films Structure »
PACS numbers: 61.46.Bc, 68.55.A-, 68.55.J-, 81.10.Jt, 81.15.Ef, 81.15.Np
The effect of Sb and Ge surfactant underlayers of different thicknesses on Cu and Au metal films in a wide range of film thickness is revealed. As shown, the surfactant underlayers predeposited on dielectric substrates cause decrease of average linear sizes of crystallites in deposited Cu and Au films. The possibility of governed fabrication of thin metal films with specified properties is revealed.