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EXPERIMENTAL APPARATUS


Mass spectrometer МS-7202М

Research technique:

• secondary ion mass spectrometry

Basic elements:

• Penning source with a cold cathode
• duoplasmatron
• monopole mass-analyzer
• lock device
• manipulator
• vacuum system

Technical parameters:

Pressure of residual gases in the chamber: 1×10^-6 Pa
Primary ion energy: (1–10) KeV
Primary ion beam diameter: ~3 mm (Penning source with a cold cathode)
                                          15 microns (duoplasmatron)
Mass number range: (1–250) a.u.m. (working conditions)
                               (1–500) a.u.m. (visual conditions)
Mass resolution: 1 М