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EXPERIMENTAL APPARATUS


Ultrahigh-vacuum complex for surface investigation

Research techniques:

• secondary ion mass spectrometry
• Auger electron spectroscopy

Basic elements:

• duoplasmatron with a cold cathode
• magnetic mass separator
• quadrupole mass analyzer
• electron gun
• cylinder mirror analyzer
• manipulator
• vacuum system

Technical parameters:

Pressure of residual gases in the chamber: 3×10^-8 Pa
Mass number range: (1–350) а.u.m.
Mass resolution: 1 М
Primary ion energy: (1–10 ) KeV
Ion probe diameter: 10 mkm
Electron beam diameter: 10 mkm
Auger electron energy: 5–2000 eV
Energy resolution: 1%