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EXPERIMENTAL APPARATUS


Ultrahigh-vacuum device for solid analysis by secondary ion mass spectrometry

Basic elements:

• Liquid metal primary ion source with working substance from Ga or In
• mass analyser
• manipulator
• vacuum system

Technical parameters:

• Mass number range: (1–350) a.u.m.
  
• Primary ion energy: (1–10) KeV
  
• Mass resolution: 1 М (mass number range 1–210 a.u.m.)
                           0,5 М (mass number range 4–350 a.u.m.)
  
• Ion beam diameter: 10 microns