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EXPERIMENTAL APPARATUS


Mass spectrometric automatic complex for gas analysis in open and closed volumes (MSC)

Research technique:

• mass-spectrometry of residual gases

Basic elements:

• monopole mass-spectrometer
• system of probe scooping
• vacuum system
• automation system

Technical parameters:

• Pressure of residual gases in the chamber: 5×10^-7 Pa
  
• Primary ion energy: 1–10 KeV
  
• Mass number range: (1×220) a.u.m.
  
• Argon sensitivity: 7×10^-2 A/Pa
  
• Mass resolution: 2 M