Issues

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2022

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vol. 20 /

Issue 2

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I. B. Olenych, Yu. Yu. Horbenko, L. S. Monastyrskii, O. I. Aksimentyeva, and B. R. Tsizh
Humidity Sensor Element Based on Porous Silicon–Graphene Nanosystem
0449–0457 (2022)

PACS numbers: 07.07.Df, 61.43.Gt, 68.37.Hk, 72.80.Vp, 73.63.-b, 81.05.ue, 92.60.jk

In this study, the hybrid porous silicon (PS)–reduced graphene oxide (rGO) nanosystems are suggested as sensitive elements to the humidity sensor creation. The electrical characteristics of the PS–rGO nanosystems are studied in the frequency range of 25 Hz–1 MHz. As shown, the electrical resistance and capacitance of sensory elements strongly depend not only on the ratio between the contents of the PS and rGO nanoparticles but also on the surrounding atmosphere. An essential increase in the electrical capacitance and decrease in resistance by about three orders of magnitude due to increasing relative humidity from 40 to 90% is detected. Dependences of sensing ability of resistive and capacitive sensor elements based on the PS–rGO nanosystems on relative humidity are analysed. The obtained results demonstrate high potential of applications of the PS–rGO nanosystems in humidity sensors.

Key words: nanosystem, graphene, porous silicon, humidity sensor, sensing ability.

https://doi.org/10.15407/nnn.20.02.449

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