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V. Ye. Panarin, M. Ye. Svavil’nyi, V. O. Moskalyuk On the modernized installation of ion-plasma sputtering with arc sputtering of a cathode, carbon nanotubes are synthesized on microdroplets, which are deposited on plates of SiO\(_2\), quartz, polycortic, titanium nitride. The investigation of formed structures on surfaces of the Fe and Ni microdroplets obtained by the vacuum-arc sputtering of cathode is carried out. These carbon structures are facetted polyhedra of different sizes and of a correct form, which are graphite single crystals or polycrystals. The primary planes for monographite embryos are the crystallographic planes of crystallized microdroplets. Interatomic distances on these planes are very close to the distances between atoms in graphene. The form of graphite single crystals firstly repeats the shape of microdroplet crystal planes, and then it nucleates its own structure in accordance with the implementation of minimizing the free energy of each subsequent synthesized graphene layer. An analysis of size, shape, and degree of overheating of metal microdroplets, which were condensed on plates in different conditions, is carried out. The study of elemental composition at points with pronounced signs of crystallization and at points with available amorphous carbon is carried out. As established, formation of crystalline graphite requires a presence of a plasma component of precursor working gas. The mechanism of formation of crystalline graphite structures on the surface of microdroplets under study is discussed. Carbon nanotubes on such microdroplets, as a rule, are not formed, in contrast to catalytic centres, which are formed specially from a catalyst thin film sputtered onto plates. Keywords: CVD synthesis, carbon nanostructures, microdroplets, arc sputtering, plasma, catalyst https://doi.org/10.15407/nnn.18.02.321
References
1. Ya. A. Ugai, Vvedeniye v Khimiyu Poluprovodnikov [Introduction to Semiconductors Chemistry] (Moscow: Visshaya Shkola: 1965) (in Russian).
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