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V. B. Molodkin, A. I. Nizkova, E. I. Bogdanov, S. V. Dmitriev, V. V. Lizunov, E. S. Skakunova, N. G. Tolmachev, Y. V. Vasylyk, A. G. Karpov, O. G. Voitok, V. P. Pochekuev Based on the use of observed effects of the asymmetry of an azimuthal dependence of a total integrated intensity of a dynamical diffraction, approach is developed and practically implemented for the non-destructive diagnostics of a profile of the inhomogeneous distribution of micro-defects in single crystals. In particular, for the first time, the distribution profile for microdefects (precipitates and dislocation loops without restrictions on their sizes) over a depth of dynamically scattering layer of a single crystal is obtained. A principal possibility of kinetics determination is shown, and the kinetics of changing of such layer complex structure after high-energy electron processing is actually determined. Key words: x-rays, total integral intensity, dynamical scattering, doublecrystal diffractometer, disturbed surface layer, large defects, azimuthaldependence asymmetry. https://doi.org/10.15407/nnn.15.02.0261 REFERENCES 1. V. B. Molodkin, V. V. Nemoshkalenko, S. I. Olikhovskii, A. I. Nizkova, E. V. Pervak, G. E. Ice, and B. C. Larson, Integral'naya Rentgenovskaya Difraktometriya Nesovershennykh Monokristallov pri Sovmestnom Ispol'zovanii Geometriy Difraktsiy po Laue i Breggu, a Takzhe Zhestkogo i Myagkogo Rentgenovskikh Izlucheniy [Integrated Single-Crystal X-ray Diffraction Imperfect when Sharing Geometries the Laue and Bragg Diffraction, as well as Hard and Soft X-Ray Radiation] (Preprint UNSC No. 1. G. V. Kurdyumov Institute for Metal Physics, N.A.S. of Ukraine- Oak Ridge National Laboratory, 1998) (in Russian). 2. V. B. Molodkin, V. V. Nemoshkalenko, S. I. Olikhovskii, A. I. Nizkova, E. V. Pervak, A. I. Grankina, G. E. Ice, and B. K. Larson, Metallofiz. Noveishie Tekhnol., 22, No. 3: 3 (2000) (in Russian). 3. V. B. Molodkin, A. I. Nizkova, S. I. Olikhovskii, V. F. Mazanko, S. E. Bogdanov, E. I. Bogdanov, A. I. Grankina, M. T. Kogut, V. P. Kryvytskii, and Y. N. Prosolov, Metallofiz. Noveishie Tekhnol., 24, No. 4: 521 (2002) (in Russian). 4. V. B. Molodkin, A. I. Nizkova, S. I. Olikhovskii, V. F. Mazanko, S. E. Bogdanov, E. I. Bogdanov, A. I. Grankina, S. V. Dmitriev, T. E. Korochkova, and M. T. Kogut, Metallofiz. Noveishie Tekhnol., 24, No. 7: 969 (2002) (in Russian). 5. V. B. Molodkin, A. I. Nizkova, S. I. Olikhovskii, A. P. Shpak, A. I. Grankina, S. V. Dmitriev, M. T. Kogut, A. N. Kostyuk, I. F. Moskovka, I. A. Osmak, I. I. Rudnytska, T. G. Sych, T. B. Slavinska, E. V. Pervak, and I. M. Ivanova, Metallofiz. Noveishie Tekhnol., 25, No. 1: 107 (2003) (in Russian). 6. A. I. 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Noveishie Tekhnol., 28, No. 8: 1041 (2006) (in Russian). 10. S. V. Dmitriev, Dinamicheskaya Teoriya Ekstinktsionnykh Effektov Diffuznogo Rasseyaniya [Dynamical Theory of Diffuse Scattering Effects of Extraction] (Disser. for Cand. Phys.-Math. Sci.) (Kyiv: G. V. Kurdyumov Institute for Metal Physics, N.A.S. of Ukraine: 2006) (in Russian). 11. V. B. Molodkin, A. I. Nizkova, E. I. Bogdanov, V. V. Lizunov, S. V. Dmitriev, Y. V. Vasylyk, A. G. Karpov, and O. G. Voitok, Metallofiz. Noveishie Tekhnol., 39, No. 5 (2017) (in press) (in Russian). 12. V. B. Molodkin, A. I. Nizkova, E. I. Bogdanov, S. I. Olihovskii, S. V. Dmitriev, N. G. Tolmachev, V. V. Lizunov, Y. V. Vasylyk, A. G. Karpov, and O. G. Voitok, Usp. Fiz. Met., 18, No. 2: 177 (2017) (in Russian). https://doi.org/10.15407/ufm.18.02.177 13. Tekhnologiya SBIS [VLSI Technology] (Ed. S. M. Sze) (Moscow: Mir: 1986) (Russian translation). 14. A. Ya. Nashel'skiy, Tekhnologiya Poluprovodnikovykh Materialov [Technology of Semiconductor Materials] (Moscow: Metallurgy: 1987) (in Russian). 15. I. E. Talanin, Mekhanizm Obrazovaniya i Svoistva Rostovykh Mikrodefektov v Bezdislokatsionnykh Monokristallakh Kremniya [The Mechanism of Formation and Properties of the Growth of Microdefects in Dislocation-free Silicon Single Crystals] (Thesis of Disser. for Dr. Phys.-Math. Sci.) (Chernivtsi: Chernivtsi National University: 2005) (in Russian). |
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