том 12 / 

выпуск 2


Скачать полную версию статьи (в PDF формате)

О. И. Вьюнов, Л. Л. Коваленко, А. Г. Белоус, O. Bohnke, C. Bohnke
«Получение наноразмерных плёнок LiPON высокочастотным магнетронным напылением»
0303–0311 (2014)

PACS numbers: 68.37.Hk, 68.55.J-, 73.40.Mr, 81.15.Cd, 82.45.Gj, 82.45.Yz, 82.47.Aa

The construction of laboratory installation for fabrication of nanoscale amorphous films of lithium phosphorus oxynitride (LiPON) by high-frequency magnetron sputtering is described. Each unit of the installation is modified in such a way that the basic parameters of deposition (HF power, substrate temperature, deposition time, pressure of working gas) could be adjusted over a wide range. The relationship between the deposition parameters and the microstructure of the LiPON films is determined. As found, the deposited LiPON films are characterized by a high ionic conductivity at room temperature (3.2?10-6 Ohm-1?cm-1) and conductivity activation energy of 0.27 eV. The fabricated LIPON/LLTO/LIPON composite solid electrolyte has a high chemical stability in contact with a lithium anode, high ionic conductivity, and can be used in electrochemical devices.

©2003—2019 NANOSISTEMI, NANOMATERIALI, NANOTEHNOLOGII G. V. Kurdyumov Institute for Metal Physics of the National Academy of Sciences of Ukraine.
E-mail: tatar@imp.kiev.ua Phones and address of the editorial office About the collection User agreement