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О. И. Вьюнов, Л. Л. Коваленко, А. Г. Белоус, O. Bohnke, C. Bohnke
«Получение наноразмерных плёнок LiPON высокочастотным магнетронным напылением»
303–311 (2014)

PACS numbers: 68.37.Hk, 68.55.J-, 73.40.Mr, 81.15.Cd, 82.45.Gj, 82.45.Yz, 82.47.Aa

The construction of laboratory installation for fabrication of nanoscale amorphous films of lithium phosphorus oxynitride (LiPON) by high-frequency magnetron sputtering is described. Each unit of the installation is modified in such a way that the basic parameters of deposition (HF power, substrate temperature, deposition time, pressure of working gas) could be adjusted over a wide range. The relationship between the deposition parameters and the microstructure of the LiPON films is determined. As found, the deposited LiPON films are characterized by a high ionic conductivity at room temperature (3.2?10-6 Ohm-1?cm-1) and conductivity activation energy of 0.27 eV. The fabricated LIPON/LLTO/LIPON composite solid electrolyte has a high chemical stability in contact with a lithium anode, high ionic conductivity, and can be used in electrochemical devices.