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С. А. Билоконь, М. А. Бондаренко, Ю. Ю. Бондаренко
«Определение адгезионной прочности тонких оксидных покрытий на диэлектрических материалах методом атомно-силовой микроскопии»
295–302 (2014)

PACS numbers: 07.79.Lh, 62.20.Qp, 68.35.Np, 68.37.Ps, 68.47.Gh, 85.35.-p, 85.85.+j

Adhesion strength of thin oxide coatings on dielectric materials (silicon, optical glass) is determined. The method of atomic-force microscopy and multiple-pass scanning of sample is used with a gradual indentation of the atomic-force microscope probe into the investigated surface. The mode of qualitative determination of adhesion strength of thin coatings by means of the selection of probe indentation step within the depth range of 1–10 nm is proposed. As established, with the increase of coating thickness, its adhesion strength decreases exponentially.