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С. Ф. Дудник, Р. Л. Василенко, В. Н. Воеводин, В. И. Грицына, К. И. Кошевой, О. А. Опалев, Е. Н. Решетняк, В. Е. Стрельницкий, В. Ф. Горбань
«Получение и свойства проводящих алмазных нанокристаллических покрытий»
0213–0224 (2014)

PACS numbers: 61.05.cf, 62.20.Qp, 62.23.Pq, 68.37.Hk, 73.61.Wp, 81.05.uj, 81.65.Lp

The experimental results on the synthesis of nitrogen-doped conductive nanostructured diamond coatings in the glow-discharge plasma are presented. The influence of the coatings’ synthesis conditions on their structure and properties are studied. The dependences of the coatings’-growth rate and their resistance in a wide range of the synthesis-parameters’ changes are determined. As shown, the changes in the electrical conduction of nanostructured diamond films doped with nitrogen are primarily related to changes in the electrical conduction of the intergrain layers and not to changes in the grain size of the diamond phase.

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