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А. В. Смородин, В. А. Николаенко
«Анализ наношероховатостей подложек с использованием левитирующих электронов над сверхтекучей плёнкой гелия»
849–854 (2011)

PACS numbers: 67.25.-k, 67.30.-n, 67.80.-s, 68.35.Ct, 73.25.+i, 73.90.+f, 85.30.De

The device for study of nanoroughness of substrates by the analysis of conductivity of electrons levitating above a helium film as a function of film thickness is described. The device contains the chamber for superfluid helium and a measuring cell with substrate horizontally positioned above measuring electrodes, which are moved in a vertical direction by electromechanical draught. Using measured electron-transport characteristics, one can identify nanoroughness from angstrom range (for an unsaturated helium film) to 102 nanometers (for a saturated helium film).