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S. P. NOVOSYADLYI and V. M. BEREZHANS’KY
«Phenomenological Approach to Analysis of Radiation Effects at Designing of Submicron Structures of Bipolar ІС»
073–120 (2009)

PACS numbers: 61.72.U-, 61.80.Jh, 73.40.Qv, 85.30.Pq, 85.40.Qx, 85.40.Ry, 85.40.Sz

Energy transfer to solids (IC structures) takes place at their interaction with corpuscular and electromagnetic radiation. As a result, properties of these solids change. In general case, the type of radiation, its energy and intensity, and the type of IC structures, which are irradiated, determine the character of this interaction and effects, which manifest themselves here. Radiation investigations presented here can underlie development of radiation-hardened technology for fabrication of both bipolar and unipolar IC structures. Radiation effects in structures with submicron junction depths and with isoplanar dielectric isolation are analyzed in detail.