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O. S. LYTVYN, P. M. LYTVYN, I. V. PROKOPENKO, and T. I. SHEREMETA
«Peculiarities of Nanostructures Topometry Studied by Atomic Force Microscopy Methods»
033–044 (2008)

PACS numbers: 07.79.Lh, 61.46.-w, 68.37.Ps, 68.65.-k, 81.07.-b, 81.16.Ta, 82.37.Gk

Peculiarities of ‘tip effect’ minimization techniques’ usage in topometric investigations using scanning atomic force microscopy are analyzed using real nanostructured surfaces as examples. Practical parameters for the computer surface-image reconstruction efficiency evaluation and optimization are presented. As shown, the combined use of various techniques for minimization of distortions in geometrical sizes of surface nanostructures caused by finite tip sizes provides adequate topometric data.